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                • 利用射頻離子化學氣相沈積技術,具有沈積速√率快,成膜質量好的※特點,可快速鍍制▃大型平面的氧化物薄膜、氮化物薄膜、氧氮化物⊙薄膜、無定型矽薄膜和碳化矽薄膜等薄膜。